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LASER AND PHOTO CVD

Two methods based on photon activation have recently been developed laser and photo CVD. These methods are still essentially in the experimental stage. [Pg.126]


The various CVD processes comprise what is generally known as thermal CVD, which is the original process, laser and photo CVD, and more importantly plasma CVD, which has many advantages and has seen a rapid development in the last few years. The difference between these processes is the method of applying the energy required for the CVD reaction to take place. [Pg.108]


See other pages where LASER AND PHOTO CVD is mentioned: [Pg.126]    [Pg.446]   


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