Interferometric lithography

Fig. 181 SEM images of equal line/space patterns printed by interferometric lithography in ESCAP resists (257 nm,257 nm immersion, 157 nm immersion, and EUV) [510]...

Today, interferometers are used widely in the alignment system of lithographic exposure tools for coordinating the movement of the exposure stage. In particular, they have found application in high-precision measurements of extremely small distances, between different objects in the exposure tool. Furthermore, interferometric lithography owes its very existence to the Michelson-Morley experiment. 

The photo-polymerization of PETIA results in smooth PPETIA films, which are much more hydrophilic than the PEMA-co-PMA copolymer investigated in the previous section (to be discussed below). Interferometric lithography on PPETIA results in excellent surface relief gratings, such as the one shown in Eig. 4a, which has a period of 2.5 pm and height 220 nm. However, when SP was introduced to the polymerizable PETIA, the interferometric pattern formed is distorted (Fig. 4b). This is most probably due to interference of the SP molecules in the... 

Membrane that can be integrated into a microfluidic system Uniform conical pores of 100 nm or smaller are created in Si by interferometric lithography Enhanced transport of pyridine as compared to commercial Alters Ileri et al. 2009... 

Boto A, Kok P, Abrams D, Braunstein S, Williams C, Dowling J (2000) Quantum interferometric optical lithography exploiting entanglement to beat the diffraction limit. Phys Rev Lett 85 2733-2736... 

In the present paper we review some of our findings on the reversible photo-induced wettability changes of polymer surfaces doped with photochromic spiropyran molecules. We illustrate how the hydrophilicity of the surfaces is enhanced upon UV laser irradiation when the embedded non-polar spiropyran molecules convert to their polar merocyanine isomers and how this process is reversed upon irradiation with green laser pulses. Moreover, we show that, when the doped polymer surfaces are micropattemed by soft molding lithography or by interferometric... 

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