Instrumentation for Energy Dispersive X-Ray Spectrometry

All EDXRF systems are able to modify the primary signal to control the excitation of the sample. This is achieved by different means, which result in three groups of systems direct excitation, secondary or 3D excitation, and total reflectance XRF (TXRF). 

100 Fm in certain nnits, capillary optics are used. Typical direct excitation units are all handheld units, isotope-based nnits, the majority of low-power and medium-power benchtop EDXRF systems, as well as the micro-XRF and dedicated plating thickness XRF units. 

TXRF systems use a secondary target and the principle of Bragg diffraction to create a more monochromatic beam. This beam is directed at very low incident angle to the sample to achieve total reflectance. The signal from the sample, which has to be prepared as very thin film or 

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