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Implanted Ion Profiles After Annealing

This section reviews the published data about diffusion phenomena of implanted species in SiC upon annealing treatments and the processes proposed to control such diffusion phenomena. [Pg.136]

Nitrogen unannealed Nitrogen annealed Boron unannealed Boron annealed [Pg.140]

See other pages where Implanted Ion Profiles After Annealing is mentioned: [Pg.136]   


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