Hollow silicon microneedle

Keywords— Computational fluid dynamic (CFD) analysis. Deep reactive ion etching (DRIE), Drug delivery, Hollow silicon microneedle, Transdermal drug delivery (TDD). 

The design of the cylindrical hollow silicon microneedle considered for strength modeling and CFD analysis is... 

Fig. 2 Design specification of hollow silicon microneedle (all dimensions are in pm)...

This paper presents a design, fabrication and analysis of hollow silicon microneedle for TDD applications. The microneedles fabrication is done using isotropic and anisotropic etching processes. The Standard silicon wafers were used for the fabrication purpose. The theoretical design and analysis of new hollow cylindrical microneedle is presented. 

As far as microfabrication is concerned, especially with silicon-based processes, microneedle design can be classified as out-of-plane or inplane depending on the orientation of the needle relative to that of the substrate material. Out-ofplane design refers to the microneedle configuration that protmdes perpendicularly from the plane of the substrate material (e.g., a silicon wafer), while in-plane refers to the design where the resulting needle lies lengthwise in the substrate plane. Examples of various microneedles (solid and hollow, out-of-plane and in-plane) are shown in Fig. la-d. 

In this paper, design and fabrication of silicon hollow microneedles is presented. Then an in-depth numerical analysis of a microneedle based piezoelectrically actuated microfluidic device is reported. The simulation involving transient multifield analysis using multiple code coupling method is conducted on three dimensional model of the microneedle based microfluidic device. 

Gardeniers HJGE et al (2003) Silicon micromachined hollow microneedles for transdermal liquid transport. J Microelectro-998 mechan Syst 12(6)... 

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