High resolution scanning HRSEM

Analysis methods, used for the investigation of modified surfaces and interfaces, are briefiy reviewed. Emphasis is on the combination of chemical, structural/ morphological, electronic, and optical characterization. Many techniques such as transmission electron microscopy (TEM), standard X-ray photoelectron spectroscopy (XPS) using A1 or Mg K radiation, high-resolution scanning electron microscopy (HRSEM), and standard scanning probe microscopies (AEM in contact... 

HRSEM High-resolution scanning electron microscopy... 

Scanning electron microscopy (SEM) and high-resolution SEM (HRSEM) (Goodhew et al. 2001) have been extensively used to study the morphology of porous silicon. It is virtually impossible to provide the reader with a complete list of works in this field. In this regard, many SEM images of high quality can be found in books, reviews (see, e.g., Canham 1997 Lehmann 2002 Sailor 2011), and even the Web ... 

Topography The surface topography of the films was analysed by (a) atomic force microscopy (AFM Nanoscope IIIA Multimode SPM, Veeco Instmments) in tapping mode under ambient conditions (cantilever resonant frequencies were in the range 330-350 kHz and the force constant was 42 N/m) and (b) high-resolution scanning electron microscopy (HRSEM FEI, NovaNano SEM 230). 

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