High frequency plasma conductivity

High-Frequency Plasma Conductivity and Dielectric Permittivity... 

High-frequency plasma conductivity and dielectric permittivity are important concepts to analyze the propagation of electromagnetic waves in plasma. One-dimensional electron motion in the electric field E = Eq cos cot = Re Eoe ) can be described by the equation ... 

The imaginary component of (3-283) corresponds to the high-frequency plasma conductivity ... 

The measurement of pg requires a pressure transducer system that is not influenced by the electric power used for the plasma polymerization, particularly when a high-frequency radio frequeny power is employed. Some pressure transducers that give pressure readouts independent of the nature of a gas are ideally suited for plasma polymerization. Some electronic gauges the readout of which depends on the nature of the gas (e.g., thermal conductivity) do not provide accurate readings of Pg because in most cases the composition the gas mixture in the LCVD reactor is unknown and there is no way to calibrate the meter for an unknown gas mixture. 

Expressiorrs for the high-frequency dielectric permittivity and conductivity can be simplified in two cases collisionless plasma and static limit. The collisionless plasma limit means co Ven- For example, microwave plasma can be considered colhsiorrless at low pressrrres (about 3 Torr and less). In this case. 

Parameter n is the refractive index of the electromagnetic wave phase velocity is V — j — and the wavelength is A = Xo/n (where ko corresponds to vacuum). The wave number k characterizes the attenuation of electromagnetic wave in plasma that is, the wave amplitude decreases e times over the length kolln. Relations between refractive index and attenuation with high-frequency dielectric permittivity and conductivity are... 

TABLE 46.5. Typical low frequency plasma frequency and relaxation time obtained from microwave frequency measurements of very highly conducting polymers. 

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