HEPA High Efficiency Particulate

HEPA (high-efficiency particulate air) filters Also known as absolute filters, the large collection filter surface area provides a high collection efficiency for particulate matter. [Pg.1447]

The off gas from the condensers consists mainly of air used to circulate the tanks by air-lift circulators it is passed through a knockout pot, heater, prefilters, and a HEPA (High Efficiency Particulate Absorber) filter before being combined with other process gases for discharge via a 200-ft stack. [Pg.73]

HEPA, high-efficiency particulate air RH, relative humidity. [Pg.74]

NOTE TAP, toxic agent protective HEPA, high-efficiency particulate air ACS. agent collection system and SDS, spent decontamination solution. [Pg.46]

DETR Department of the Environment, Transport and the Regions HEPA High efficiency particulate arrester HSC Health and safety commission... [Pg.127]

HEPA High efficiency particulate air SUM Standard reference material... [Pg.767]

In order to reach the B,C, and D air grades, the number of air changes should generally be higher than 20 per hour in a room with a good airflow pattern and appropriate HEPA (high-efficiency particulate air) filters. [Pg.67]

Legend CVD (chemical vapor deposition), CMP (chemical mechanical polishing), HMDS (hexamethylene disilazane), TMAH (tetramethyl ammonium hydroxide), NMP (N-methyl pyrilldone), ARC (antireflection coating), RIE (reactive-ion etching), EPI (epitaxial), HEPA (high-efficiency particulate air), ULPA (ultralow-penetration air)... [Pg.631]

CO carbon monoxide HEPA high-efficiency particulate air... [Pg.18]

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