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HARMST

If the approximation function is described as Deep lithography HARMST (High Aspect Ratio a linear combination of shape functions cpy(x) so Microstructure Technology) that... [Pg.1625]

Kassing R, Rangelow IW (1996) Etching process for high aspect ratio micro systems technology (HARMST). Microsyst Technol 3 20-27... [Pg.2781]

Tirumala, V, Divan, R., Mancini, D., and Caneba, 2003c. Lithographically-Assisted Synthesis of High Aspect-Ratio Hydrogel Microstructures , this paper was partly presented at the Fifth International Workshop on High Aspect Ratio Microstructure Technology (HARMST), Monterey, CA, June 15-17. [Pg.172]

HARMST (High Aspect Ratio Micro-Structure Technoiogy)... [Pg.791]

See other pages where HARMST is mentioned: [Pg.1625]    [Pg.1000]    [Pg.1625]    [Pg.1000]   
See also in sourсe #XX -- [ Pg.791 ]



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HARMST (High Aspect Ratio Micro-Structure

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