Glow Discharge Optical Emission Spectrometry

Acronyms GDOES (glow discharge optical emission spectrometry) 

A flat solid sample is needed, the size should be of the order of centimeters. 

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R. Payling, D. Jones, A. Bengtson (eds.J Glow Discharge Optical Emission Spectrometry, John Wiley and Sons, Chichester 1997. 

After Bengtson et al. [161]. Reprinted from A. Bengtson etal., in Glow Discharge Optical Emission Spectrometry (R. Payling et al, eds), pp. 3-11. Copyright 1997 John Wiley Sons, Limited. Reproduced with permission. 

GD-OES (glow discharge optical emission spectrometry) are applied. AES (auger electron spectroscopy), AFM (atomic force microscopy) and TRXF (transmission reflection X-ray fluorescence analysis) have been successfully used, especially in the semiconductor industry and in materials research. 

Today, as a direct solid-state analytical technique, dc GDMS is more frequently applied for multi-element determination of trace contaminants, mostly of high purity metallic bulk samples (or of alloys) especially for process control in industrial laboratories. The capability of GDMS in comparison to GD-OES (glow discharge optical emission spectrometry) is demonstrated in a round robin test for trace and ultratrace analysis on pure copper materials.17 All mass spectrometric laboratories in this round robin test used the GDMS VG 9000 as the instrument, but for several... 

A depth profile analysis of trace and matrix elements (B, Na, Ni, Fe, Mg, V, A1 and C) in a 26p.m Si layer on a SiC substrate measured by GDMS, yielded impurity profiles, for example, with constant Ni contamination in the Si layer and enrichment at the interface layer.45 However, with respect to depth profiling of thin layers using dc GDMS with a depth resolution between 50 and 500 nm, this technique plays a subordinate role compared to the commercially available and cheaper GD-OES (glow discharge optical emission spectrometry). 

Three techniques with spatially resolved information capabilities have been selected here for some further explanation EPXMA, laser-induced breakdown spectroscopy (LIBS) and glow discharge optical emission spectrometry (GD-OES). Figure 1.15 summarises the lateral and depth resolution provided by the techniques described in this section. It is worth noting that the closer to the bottom left corner the technique is located, the higher (and so better) is the depth resolution. 

Hoeemann V., Kurt R., Rammer K., Thielsch R., Wirth Th. and Beck U. (1999) Interference phenomena at transparent layers in glow discharge optical emission spectrometry, Appl Spectrosc 53 987-990. 

GDOES Glow Discharge Optical Emission Spectrometry, 17... 

Payling R (1998) Glow discharge optical emission spectrometry. Spectroscopy 133 36—48. 

Interference phenomena at transparent layers in glow discharge optical emission spectrometry, Appl. Spectrosc. 53 987-990. 

Bogaerts A., Wilken L., Hoeemann V., Gijbels R. and Wetzig K. (2002) Comparison of modeling calculations with experimental results for RE glow discharge optical emission spectrometry, Spectrochim. Acta, Part B 57 109-119. 

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