Fuel MEMS-based micro electro mechanical

Yao, S.C., Tang, X., Hsieh, C.C., Alyousef, Y, Vladimer, M., Redder, G.K., Amon, C.H., 2006. Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development. Energy 31 636-649. 

Parra E, Lin L (2009) Microbial fuel cell based on electrode-exoelectrogenic bacteria interface. Proc. of 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS) 31-34... 

Min K, Tanaka S, Esashi M (2003) Silicon-based micro-poljnner electrolyte fuel cells. In IEEE intemational conference on micro electro mechanical systems, Kyoto Min K, Tanaka S, Esashi M (2006) Fabrication of novel MEMS-based polymer electrolyte fuel cell architectures with catalytic electrodes supported on porous Si02- J Micromech Microeng 16 505-511 Miu M, Danila M, Ignat T, Craciunoiu F, Kleps I, Simion M, Bragam A, Dinescu A (2009) Metallic-semiconductor nanosystem assembly for miniaturized fuel cell applications. Superlatt Microstmct 46 291-296... 

Zhao TS (2009) Micro fuel cells principles and applications. Elsevier, Amsterdam Zhou Y, Wang X, Wu Z, Wu X, Liu L (2011) Passive fuel delivery based on hydrophobic porous silicon for micro direct methanol fuel cells. In TREE 24th international conference on micro electro mechanical systems (MEMS), Cancun, Mexico Zhu L, Lin KY, Morgan RD, Swaminathan VV, Kim HS, Gurau B, Kim D, Bae B, Masel RI, Shannon MA (2008) Integrated micro-power source based on a micro-silicon fuel cell and a micro electromechanical system hydrogen generator. J Power Sources 185 1305-1310... 

One of the technological ways to miniaturize fuel cells is to have recourse to standard microfabrication techniques mainly used in microelectronics and more especially the fabrication of micro- and nano-electro-mechanical systems (MEMS/NEMS). Actually more and more papers show the interest in developing MEMS-based fuel eells, either directly with silicon substrates (fig. 2), or adapting the methods to other substrates such as metals or polymers. These techniques enable notably mass fabrication at low cost (very large number of devices on a very small area) and then eould lead to the reduetion of the global cost of the miniature fuel cells. 

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