Fluoroethyl methacrylates

Table IV compares the X-ray exposure characteristics (at 8.3 X, Al Kai,2 emission line) of the halogenated resists and of PMMA Elvacite 20U1. It can be seen that poly(2-ehloroethyl methacrylates) and poly(2-bromoethyl methacrylates) exhibit a low sensitivity unlike poly(2-fluoroethyl methacrylates) and poly(2-, 2-,2-trifluoroethyl methacrylates) which are more sensitive than PMMA as shown in Figures 2a, 2b, 2c, 2d where the dose-thickness curves of these resists are plotted. The low sensitivity of the PC1EMA and PBrEMA samples may be explained by some competing crosslinking reactions which could occur during exposure as a result of C-Cl and C-Br homolytic bond scissions as noted by Tada...

Fluoroethyl methacrylate Alkyl methacrylate Single Tg II had an alkyl group of meihyl or ethyl Peng et al. (1993)... 

Understanding of the behaviour of F-containing polymers has very recently been broadened by studies of three methacrylate polymers in which the ester group contains fluorine poly-(2-fluoroethyl methacrylate) (PFEMA), poly(2,2,2-trifluoroethyl methacrylate) (PTFEMA) and poly(hexafluoroisopropyl methacrylate) (PHFPMA). The experimental approach used is flash pyrolysis of microgram quantities of polymer at 600 °C in a helium atmosphere, followed by GC separation of volatile products and identification by MS. This produces a convenient picture of the number and relative importance of the volatile products. 

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