Fluorinated polymethacrylate

For technological reasons, the energy flux deposited at the wafer is low, so highly sensitive resists (o<10 mj/cm ) are required. A typical sensitivity curve of fluorinated polymethacrylate (FPB) in comparison to the curve of PMMA is shown in Figure 6.21. 

It has also been reported the mechanism on dewetting by increasing temperature of perfluoroalkyl methacrylate as homo- and copolymer with methyl methacrylate films. The following qualitative model has been proposed (Sheiko et al, 1996). As has already been stated, perfluoroalkyl-substituted polymethacrylates have been shown to form ordered structures based on the crystallisation of the perfluoroalkyl side chains and the incompatibility of the fluorinated and the hydrocarbon segments. 

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