Field strength film capacitor

Thickness and, correspondingly, capacitance variation was less than 2%. The absence of impurity peaks in XPS spectra of silica-coated specimens clearly demonstrates the achieved purity. Yield, defined as the percentage of functioning vs. total measured capacitors, was 100%. Breakdown field strength was in the range 1.1-5.4 MV/cm and leakage current was about lO -lO A/cm at 0.5 MV/cm. Capacitance density was 23-350 nF/cm dependent on thin film thickness and materials. No breakdown was observed after 20 cycles between 0-40 V. Time dependent dielectric breakdown (TDDB) was 185 s at 40 V for ten of the patterned capacitors. 

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