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Fabrication of Chip-Like Microreactors

Techniques for the production of chip-like systems will be discussed below. These techniques should allow the cost-efficient mass production of the smallest scale (sub-Watt) fuel processors in the future. [Pg.367]

Connections between bond pads onpyiex end RTD/hei I— Bond pads on pyrex for connection to controller [Pg.367]


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Chips, fabricated

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