Fabrication of Buried Channel Waveguides

Electro-optic modulation typically requires concentration of co-propagating radio frequency and optical fields in a narrowly defined region of space called a 

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In this work, we report on the fabrication of buried channel waveguide lasers in Nd YAG ceramics by using a two line confinement approach. Light confinement has been achieved between two... 

Electron cyclotron resonance (ECR) etching provides even better control (due to magnetic field confinement) of the reactive plasma and yields smoother walls th . are obtained with RIE. A typical ECR instrument is the PlasmaQuest model 375 machine. Thus, both RIE and ECR methods permit fabrication of buried channel waveguides with negligible optical loss due to channel or ridge preparation. 

We have carried out extensive investigations of the sources of poling induced optical loss and of losses associated with the fabrication of buried channel waveguide structures and the intergration of polymeric modulator waveguides with silica optical fibers. 

Buried channel-fluorinated waveguides consisting of a single material can be fabricated by direct election beam writing, and we hope to develop novel optical devices by using dris method. 

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