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Extrinsic Doping of CVD ZnO

The following section describes in detail the important steps in the development of polycrystalline doped ZnO layers as deposited by CVD process. These steps consist in optimizing the following  [Pg.236]

In the following, each step will be described, both for the AP-CVD and for the LP-CVD cases. The results presented are focused on those properties of ZnO films that are useful for thin film solar cell applications, i.e., transparency, conductivity, and light scattering capability. The last part of paragraph 6.2 comments briefly on alternative methods of CVD processes that have been investigated for ZnO deposition (PE-CVD, photo-CVD,. ..). [Pg.237]

Finally, the last paragraph of this chapter summarizes the work so far published on thin film solar cells using CVD-deposited ZnO layers as transparent contacts. [Pg.237]


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