Ethylenediamine Pyrocatechol

In ethylenediamine-pyrocatechol (EPW) solution, water is necessary for the electrochemical reaction as no anodic current is measured when water is not present in the solution. Water is required for the formation of the complex structure between pyro-catechol and Si(IV). Figure 6.33 shows the significant change of t-Vbehavior in liquid ammonia due to the presence of a small amount of water. ... 

A. Reisman, M. Berkenblit, S. A. Chan, F. B. Kaufman, and D. C. Green, The controlled etching of silicon in catalyzed ethylenediamine-pyrocatechol-water solutions, J. Electrochem. Soc. 126, 1406,... 

N. F. Raley, Y. Sugiyama, and T. V. Duzer, (100) silicon etch-rate dependence on boron concentration in ethylenediamine-pyrocatechol-water solutions, J. Electrochem. Soc. 131, 161, 1984. 

J. R. Troxell and J. L. Kenty, Silicon grain delineation using ethylenediamine pyrocatechol, J. Electrochem. Soc. 134, 2369, 1987. 

S. A. Campbell, D. J. Schiffrin, and P. J. Tufton, Chemical and electrochemical anisotropic dissolution of silicon in ethylenediamine + pyrocatechol + water media, J. Electroanal. Chem. 344, 211, 1993. 

HNA (HF + HNO3 + acetic acid) Alkali-OH EDP (ethylenediamine pyrocatechol) TMAH (tetramethylammonium hydroxide) XeFz SF plasma DRIE (deep reactive-ion etch)... 

Experimental observations indicate that the oxidation of cobalt (II) to cobalt (III) and the formation of ethylenediamine from N-hydroxyethylethylene-diamine occur simultaneously. This is quite the opposite to what is usually assumed in other instances of transition metal catalysis of organic reactions—for example, the catalytic effect of manganese in the oxidation of oxalic acid (7, 8), of iron in the oxidation of cysteine to cystine (22) and of thioglycolic acid to dithioglycolic acid (5, 23), of copper in the oxidation of pyrocatechol to quinone and in the oxidation of ascorbic acid (29, 30), and of cobalt in the oxidation of aldehydes and unsaturated hydrocarbons (4). In all these reactions the oxidation of the organic molecule occurs by the abstraction of an electron by the oxidized form of the metal ion. 

Abbreviations DHG = Ar,Ar-di(2-hydroxyethyl)glycine NTA = nitrilotriacetic acid EDTA = ethylenediaminetetraacetic acid tiron = pyrocatechol-3,5-disulfonic acid BAL = 2,3-dimercaptopropanol unithiol = sodium 2,3-dimercaptopropane sulfonate tren — triaminatriethylamine penten = tetrakis(aminoethyl)ethylenediamine bipy = 2,2 -bipyridyl phen = 1,10-phenanthroline. 

Pyrocatechol Precipitate in presence of ethylenediamine, pyridine or quinoline 5-100 [32]... 

Alkaline solutions are another major group of etchants widely used for etching of silicon materials. The most commonly used alkaline solutions have been KOH and EDP (or EPW) which is a mixture of ethylenediamine (ED or E), pyrocatechol (P), and water Other solutions such as NH4OH, hydrazine, ethanolamine, and tetram-... 

Among the organic alkaline systems, solutions consisting of ethylenediamine, water, and pyrocatechol (EDP) are among the most widely used. The etch rate ratio in EDP, although lower than that of... 

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