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This system, denoted as Environmentally Stable Chemical Amplification Positive Photoresist, ESCAP, has become the standard 248 nm resist in device manufacture by leading chip makers. It is capable of printing features with a density of 125 nm [29]. [Pg.241]

See other pages where Environmentally stable chemical amplification positive photoresist is mentioned: [Pg.200] [Pg.200]

See also in sourсe #XX -- [ Pg.188 , Pg.301 ]