Energy input parameter

Normalized Energy Input Parameter to Luminous Gas Phase... 

Thus, the material formation in the luminous gas phase (deposition G), which is given in the form of normalized deposition rate (D.R./F Af), can be controlled by the composite parameter WjFM (normalized energy input parameter), which represents the energy per unit mass of gas, J/kg. Because of the system-dependent nature of LCVD, WjFM is not an absolute parameter and varies depending on the design factor of the reactor. The value of WjFM in a reactor might not be reproduced in a different reactor however, the dependency remains the same for all deposition G. 

Normalized Deposition Rate and Energy Input Parameter in DC Discharge... 

The implications of the correlation shown in Figure 8.7 are as follows (1) The energy input parameter (based on the luminous gas phase) does not control the deposition of material onto the cathode surface. (2) The current density of a DC glow discharge is the primary operational parameter. (3) The flow rate of monomer does not influence the film thickness growth rate. (4) The film thickness growth rate is dependent on the mass concentration of monomer (cM) in the cathode region rather than the mass input rate (FM). (In these experiments, the system pressure was maintained at a constant value of 50 mtorr, and thus c was a constant.)... 

INTERNAL STRESS AS A FUNCTION OF NORMALIZED ENERGY INPUT PARAMETER... 

In general plasma polymerization processes it has been established that the deposition rate and properties of a plasma polymer primarily depend on the value of the normalized energy input parameter WjFM, as described in Chapter 8. In LPCAT polymerization processes, as described in Chapter 16, the deposition rate of a plasma polymer primarily depends on the value of the normalized energy input parameter, which is given by W FM)J FM). In this composite parameter, W is the power input applied to arc column, FM) is the mass flow rate of carrier gas (argon), and FM) is the mass flow rate of monomer that is injected into the cascade arc torch. The quantity of W FM)J FM) can be considered as the energy, which is transported by carrier gas plasma, applied to per mass unit of monomers. 

Figure 11.11 Dependence of internal stress on the energy input parameter, W (FM)c/ (FM)m, for cascade arc torch polymerization.

The chemical and physical properties of plasma polymers derived from a monomer are dependent on many factors of overall conditions of plasma polymerization. In other words, a monomer does not yield a well-defined polymer in plasma polymerization. The variation of properties is largely influenced by the energy input parameter of plasma polymerization, WjFM, as described in Chapter 8. 

In such a system, energy input into the cascade arc is responsible only for the formation of the luminous gas phase of argon, and the generation of the reactive species of monomers that is introduced into the luminous gas jet of Ar in the expansion chamber is caused by the argon luminous gas phase. Therefore, the power input into the cascade arc cannot be used as the energy input parameter for LCVD that takes place only in the second expansion chamber. 

Normalized Energy Input Parameter of LPCAT LCVD... 

In plasma polymerization, the dependence of the deposition rate on the operating condition varies based on the domain of the plasma polymerization as described in Chapter 8. There are three domains energy-deficient domain, transitional domain, and monomer-deficient domain. They are classified based on the dependence of the normalized deposition rate, DjFM, on the normalized energy input parameter, WjFM, where D is the deposition rate. 

The separation properties of the membranes vary not only with the thickness of the plasma polymer coatings but also with the conditions of LCVD. One such plot of the variation is shown in Figure 34.21 [14]. The upper portion of this figure shows how the specific conversion parameter, DRjFM, varies as a function of the composite energy input parameter, WjFM. DR is the nominal deposition rate of plasma polymer film on the surface of a quartz crystal thickness monitor located in the plasma reactor, adjacent to the hollow fibers. 

Figure 35.1 The dependence of deposition rate on the energy input parameter WjFM.

Fig. 11 illustrates how well the thickness growth rate, GR/FM, in 40 kHz and 13.5 MHz glow discharge of methane and n-butane, can be expressed as a function of the composite energy input parameter W/FM. Regardless of the mass of monomer, flow rate, and... 

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