Electron-specimen interactions

Figure Bl.17.1. Schema of the electron specimen interactions and their potential use for structural and analytical studies.

Monte Carlo electron trajectory simulations provide a pictorial view of the complei electron—specimen interaction. As shown in Figure 2a, which depicts the interac-... 

Fig. 8 Schematic of electron beam interaction with a sample and the electron beam interaction volumes for electron-specimen interactions.

Fig. 6.19 Generalized illustration of interaction volumes for various electron-specimen interactions. Auger electrons (not shown) emerge from a very thin region of the sample surface (maximum depth about 50 A) than do secondary electrons (50-500 A).

Electron-Specimen Interactions 29.2.3.3.1. Elastic and Inelastic Scattering... 

Numerous types of electron-specimen interactions for imaging and analysis (SE, BSE, EBIC, CL, EDS, WDS, EBSD)... 

Electron-specimen interactions in LVSEM are often quite different from those in conventional SEM. Reimer [165] has pointed out that the physics of the 0.5-5 kV and 5-30 kV ranges differ in many important respects. As in conventional SEM, knowledge of electron-specimen interactions is important for interpretation of image contrast in LVSEM [166]. 

The interaction between an electron and a specimen is what makes X-ray analysis and electron microscopy possible, and these two analytical techniques are often used in collaboration with each other in reverse engineering. A brief review of electron specimen interaction and the subsequent emission will be discussed in this section, which will benefit the later discussion on material identification utilizing these techniques. When the energetic electrons in the microscope strike the specimen, a variety of reactions and interactions will occur, as shown in Figure 5.3. The electrons emitted from the top of the specimen are utilized to analyze the bulk samples in scanning electron microscopy (SEM), while those transmitted through the thin or foil specimens are used in transmission electron microscopy (TEM). 

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