DISH criteria

Kneule and Weinspach [284] in a comprehensive research study have derived the suspension characteristics for the l-s criterion with a number of stirrer types in baffled and unbaffled vessels with differently shaped bottoms (dished, hemispherical, truncated cone, flat) by using 2 tank sizes (D = 0.37 and 2.07 m) and different solid particles p 2630 to 11.100 kg/m dp = 1.1-10 mm) with mass fractions Pn, of 0.02 to 0.25. As an example, experimental data are presented in Fig. 5.6, which were obtained with an open double turbine (12-paddle stirrer with paddle height b of b/d = 0.5 from EKATO) in baffled tanks with dished bottoms (D = 370 mm D/d = 3.25 h/d = 0.5 circles D — 370 mm filled triangles D = 2.07 m). 

A general criterion for optimizing the metal CMP process is the controlled regulation of material removal, while simultaneously securing the processed surface from various CMP-related defects like scratches, dishing, delamination, erosion, contamination, line deformation, and galvanic corrosion (Baneijee and Rhoades, 2008 Choi and Korach, 2009). The considerations for improving material removal rates (MRRs) are mostiy relevant in the context of bulk Cu CMP, but are relatively less critical for the thin (<5 nm) diffusion barrier metal films. However, the requirement for defect control continues to remain a major issue in essentially all cases of metal CMP (Chandrasekaran et al., 2004). 

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