CVD in Electronic Applications Conductors, Insulators, and Diffusion Barriers

CVD in Electronic Applications Conductors, Insulators, and Diffusion Barriers 

CVD plays an increasingly important part in the design and processing of advanced electronic conductors and insulators as well as related structures, such as diffusion barriers and high thermal-conductivity substrates (heat-sinks). In these areas, materials such as titanium nitride, silicon nitride, silicon oxide, diamond, and aluminum nitride are of particular importance. These compounds are all produced by CVD. 1 1 PI 

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