Coatings tantalum silicide

Inorganic antireflection coatings are typically deposited by sputtering, and as opposed to organic antireflection coatings, may in some cases be left in the finished device. Typical inorganic antireflection coatings include silicon oxynitride, amorphous silicon, tantalum silicide, titanium nitride, etc. 

Stern K.H. and Carlton E.W., Electrodeposition of Tantalum Silicide Coatings from molten salts, (1986),/. Electrochem. Soc., 133, 2157-60. 

Priceman, C. and Soma, L., Development of Fused Slurry Silicide Coatings for the Elevated Temperature Oxidation Protection of Niobium and Tantalum Alloys, Report AFML-TR-68-210, Sylvania Electric Products Inc., Dec. (1968)... 

Hallowell, J.B., Maykuth, D.J. and Ogden, H.R., Silicide Coatings for Tantalum and Tantalum-Base Alloys, in Refractory Metals and Alloys III Applied Aspects, 30, Part 2, American Institute of Mining, Metallurgical and Petroleum Engineers, Dec. (1963)... 

Another example is the silicidizing of tantalum, basically an oxidation— reduction reaction. The packing is sodium fluoride and silicon. After deposition, the coating diffuses continuously into the substrate, according to the following reactions ... 

Aluminide and silicide cementation coatings such as TaAl3 on tantalum and MoSy on molybdenum oxidize at slow rates and possess some inherent self-repair characteristics. Fine cracks that appear and are common to these coatings can be tolerated because stable, protective oxides form within the cracks and seal them. Thermal cycling, however, accelerates failure because of thermal expansion mismatch that ultimately disrupts the protective oxide coating. 

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