Clamped circular diaphragm

Figure 2.13 Deflection of released membranes. (Left) Clamped circular diaphragm with thickness t and radius r subjected to a point load P at its center. (Middle) Clamped circular diaphragm subjected to a distributed load q N/m or Pa. (Right) Clamped square diaphragm with sides of length a subjected to a point load P at its center. (Reprinted with permission from Prof. Hiroshi Toshiyoshi, Institute of Industrial Science (IIS), The University of Tokyo, Japan.)...

We next consider a small (linear) deflection of a clamped circular diaphragm under a distributed load as an example of a pressure sensor. The deflection d at the center of a stress-free clamped circular diaphragm with radius r is given by... 

A schematic cross-section diagram of a drop ejector fabricated in the PolyMUMPS process is shown in Figure 6.10. The actuator is a clamped circular diaphragm similar to the M-Test structure CD discussed in Chapter 2, Section 2.8. The membrane diaphragm is defined in the Polyl layer (2 pm) and is pulled down by application of a voltage to a... 

Figure 6.11 Formation of Newton s rings for a clamped-circular diaphragm defined in Polyl that has been pulled down by the application of a voltage to PolyO (Xerox MEMSJet).

Wilhams, J. L., J. H. Chen, and D. M. Belloh. 1992. Strain fields on cell stressing devices employing clamped circular elastic diaphragms as substrates. / Biomech Eng 114 377-84. 

In a diaphragm pressure gauge the elastic deflection of a circularly clamped metal disk is transferred to a pointer. Such devices are suitable for measuring ranges of 0-0.5 mbar and 0-70 bar [3]. For vacuum applications the range is 0-0.5 mbar and 0-1 bar vacuum. They are also suitable for differential pressure measurement if both sides of the diaphragm are connected with the respective measuring points. 

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