Chemical Vapour Deposition process

Boron fibres are made by means of a CVD process, a Chemical Vapour Deposition process. Boron trichloride is heated in an oven and as a result it breaks down ... 

Some kinetic considerations of chemical vapour deposition processes Ch. 17... 

A reaction chamber, also called a reactor, is the key subsystem of a CVD system, in which a chemical vapour deposition process takes place. In general a reaction chamber consists of the following parts as shown in Figure 3.12 ... 

High-temperature Chemical Vapour Deposition Process... 

Quantitative Control of Chemical Vapour Deposition Process Parameters... 

Hwang NM, Yoon DY (1994) Driving force for deposition in the chemical vapour deposition process. J Mater Sci Lett 13 1437-1439... 

Cindrella L, Kannan AM, Ahmad R, Thommes M (2009) Surface modification of gas diffusion layers by inorganic nanomaterials for performance enhancement of proton exchange membrane fuel cells at low RH conditions. Int J Hydrogen Energ 34 6377-6383 Kannan AM, Kanagala P, Veedu V (2009) Development of carbon nanotubes based gas diffusion layers by in situ chemical vapour deposition process for proton exchange membrane fuel cells. J Power Sources 192 297-303... 

According to Viguid and Spitz [75], both a chemical and a physical factor determine whether or not a spray process can be classified as chemical vapour deposition. Processes that may occur with increasing temperature arc shown schematically [75] in Fig. 16. In process A the droplets reach the substrate, the solvent vapourizes and leaves a dry deposit which will react and form a film. 

The halogenation of metals provides opportunities to study scaling reactions in which the reaction product is a pure ionic conductor, which can also be highly volatile. These systems can be studied at relatively low temperature they are important in their own right in terms of the mechanisms of extraction and chemical-vapour-deposition processes that employ gaseous halides as intermediate compounds. 

Carbon nanotubes have reached commercialisation although so far the production scale has been very small this will soon change. There are two types single-wall and multi-wall. Thomas Swan, the fine chemical manufacturers, are producing single walled nanotubes by a chemical vapour deposition process, and marketing them under the name of Elicarb. 

The rapidly advancing applications of metal alkoxides for synthesis of ceramic materials by sol-gel/MOCVD (metallo-organic chemical vapour deposition) processes (Chapter 7) have more recently given a new impetus to intensive investigations on synthetic, reactivity (including hydrolytic), structural, and mass-spectroscopic aspects of oxo-alkoxide species. ... 

Figure 16 Infrared transmission spectra for aluminium nitride films deposited by chemical vapour deposition process (40).

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