CCLRC Rutherford Appleton Laboratory

FIGURE 18.2 Scanning electron micrographs of silicon microneedles, (a) Silicon microneedles micro-fabricated using a modified form of the BOSCH deep reactive ion etching process. The microfabrication process was accomplished at CCLRC Rutherford Appleton Laboratory (Chilton, Didcot, Oxon, UK). The wafer was prepared at the Cardiff School of Engineering, Cardiff University, UK. Bar = 100 pm (b-d) platinum-coated silicon microneedles prepared using a wet-etch microfabrication process performed at the Tyndall National Institute, Cork, Ireland. Bar = 1 mm (b), 100 pm (c,d). 

ISIS Facility, Rutherford Appleton Laboratory, Council for the Central Laboratory of the Research Councils (CCLRC), Chilton, Didcot 0X11 OQX, UK Department of Physics and Astronomy, University College London, Gower Street, London WC1E6BT, UK... 

RK Heenan. FISH Data Analysis Program. Didcot, UK Rutherford Appleton Laboratory Report RAL-89-129, CCLRC, 1989. 

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