Bombardment, effects

As a result of ion bombardment effects and of their ability to reduce native oxides chemically, chlorocarbon or fluorocarbon gases, rather than pure halogens, are typically used to etch metal films (Table IV). 

Liau, Z.L., Mayer, J.W. Ion bombardment effects on material composition. In Hirvonen,... 

However, there are also many non-crystalline films which are either true polymers or are formed because of insufficient energy supply during their deposition. Energetic particle bombardment effects may also cause amorphous but very dense structures. 

When an atomic-sized energetic particle impinges on a surface, the particle bombardment effects can be classed as ... 

The momentum and energy exchange and the effects on a surface are discussed in Sec. 2.4.1. Bombardment effects are shown in Figure 7.1 and include ... 

In a growing film that is being concurrently bombarded by energetic particles, the surface and near-surface region is continually being buried and the bombardment effects are trapped in the growing film. 

D.M. Mattox, Particle Bombardment Effects on Thin Film Deposition A Review,... 

Low pressure PECVD (LPPECVD) (vacuum deposition processes) Plasma-enhanced CVD (PECVD) performed at a low enough pressure (10-20mTorr) that high energy ion bombardment effects can be important. See also Plasma-enhanced CVD (PECVD). 

Taguchi M, Hamaguchi S (2006) Molecular dynamics study on At ion bombardment effects in amorphous Sio2 deposition processes. J Appl Phys 100(12) 123305... 

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