Applications of Surface and Thin-Film Silicides

Some metallic silicides have played an important role in the development of the microelectronics industry, such as PtSi, and several others are used in complementary metal oxide semiconductor (CMOS) technologies, notably TiSi2,CoSi2 and NiSi, providing ohmic contact, interconnect, gate, and diffusion barriers because of their excellent conductivity and their overall compatibility with Si technology. 

Surface and Interface Science Properties of Composite Surfaces Alloys, Compounds, Semiconductors, 

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