Applicability of Magnetrons in LCVD

In certain applications of plasma polymerization, the incorporation of electrode material, particularly in a controlled and designed manner, is extremely useful and becomes a great asset in LCVD. For instance, a thin layer of plasma polymer of methane with a tailored gradient of copper has been shown to improve the adhesion of the thin layer to a copper substrate as well as the adhesion of metal to a polymer film [3,4]. In general applications of LCVD, in which the metal contamination should be avoided, it is important to select the electrode material that has low sputtering yield. Titanium has been used successfully in such cases. 

The chemical and physical properties of plasma polymers derived from a monomer are dependent on many factors of overall conditions of plasma polymerization. In other words, a monomer does not yield a well-defined polymer in plasma polymerization. The variation of properties is largely influenced by the energy input parameter of plasma polymerization, WjFM, as described in Chapter 8. 

Use of a magnetron enables us to operate plasma polymerization at rather high energy input levels by virtue of low FM and the small glow volume, which often cannot be achieved by the ordinary glow discharge without magnetic confinement. Certain characteristics of plasma polymers can be obtained only under conditions of 

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