Anhydride cross-linked acrylate resists

Figure 17.9 The chemistry of the CARL process scheme. x may stand for hydroxystyrene, acrylates, and alicyclic monomeric units, etc. R represents an alkyl group. Structure (I) is the alkaline-insoluble resist resin, consisting of an alternating polymer of maleic anhydride and an appropriate monomer. Structure (II) is the product of the base-catalyzed hydrolysis of the anhydride resin. Structure (III) is the bis-diaminoalkyl-oligo-dimethylsiloxane, the CARL process silylating agent. Structure (IV) is the cross-linked product of silylating agent and the hydrolyzed anhydride resist resin.

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