High-temperature aerosol decomposition process

Hydrocarbon Partial Oxidation Catalysts Prepared by the High-Temperature Aerosol Decomposition Process Crystal and Catalytic Chemistry... 

Moser, W. R., Hydrocarbon partial oxidation catalysts prepared by the high-temperature aerosol decomposition process, in Catalytic Selective Oxidation, ACS Symp. Ser. (S. T. Oyama and J. W. Hightower, Eds.), pp. 523,244 (1993). 

Moser, W. R., Lennhoff, J. D., Cnossen, J. E., Fraska, K., and Rozak, J. R., The high-temperature aerosol decomposition process A general method for the synthesis of complex catalysts. Preprnt. Petroleum. Div., Amer. Chem. Soa 40(1), 49 (1995). 

Figure 1. Aerosol process configuration for the continuous preparation of metal oxides by the High Temperature Aerosol Decomposition (HTAD) Process.

Moser, W. R., Knapton, J. A., Koslowski, C. C., Rozak, J. R., and Vezis, R. H., Noble metal catalysts prepared by the high-temperature aerosol decomposition (HTAD) process, Catal. Today 21,157 (1994). 

Even though all three reactors share the same precursor delivery system, each tool offers specific advantages. For example, a cold-wall reactor (reactor B) helps prevent decomposition of the precursor before it reaches the substrate. A pulsed aerosol injection system at low pressure (reactor C) allows the film to grow under better-defined conditions than in a continuous process (reactor A) because of the minimization of undesirable transient effects caused by the high volatility of the solvents used.46 A more detailed description of each of the conditions for film growth, including reactor type, precursor type, delivery method, deposition temperature, growth time, and other parameters are summarized in Table 6.2. Depositions were done on bare and Mo-coated... 

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