Additional SIMS Methods of Interest

Note This is not an exhaustive list (there are other manufacturers from other areas that should also be considered where applicable). 

This addendum covers some additional methods that have been developed, or at the very least, proposed, for quantifying or aiding the quantification of the signals (conversion of intensities to concentration values) arising from atomic secondary ion emissions noted nnder Dynamic SIMS conditions, i.e. depth profiling. 

With the exception of one of these methods, these are all based on the nse/modification of Relative Sensitivity Factors (RSFs) such that regions typically outside the scope of the RSF method can be quantified, even if it is only at a semi-quantitative level. 

Indeed, it has long been recognized that one of the primary limitations of SIMS revolves around the difficuldy in quantifying the recorded data. As indicated in Section 5.4.3.1, the RSF method is by far the most common and heavily utilized method for quantification of the secondary ion signals recorded in SIMS, whether 

Quantification is only possible within a specific layer of interest, when matrix-matched reference materials exist that contain the element of interest (Note These must be examined in the same analytical session to avoid instrument-induced variations) 

---