ACIS with a Quadrupole Deflector at the Universitat Rostock

2 ACIS with a Quadrupole Deflector at the Universitat Rostock 

The setup at the Universitat Rostock utilizes an ACIS to produce a continuous cluster beam (see Fig. 3.9). The metal vapor plasma is created in the cylindrical cathode of target material. The fabricated clusters, neutral and charged are expanded through an exit nozzle and collimated by an aerodynamic lens attached to the source. The clusters then flow through a secondary pumping stage bracketed by two skimmers and are size selected by an electrostatic quadrupole deflector for deposition. 

FIGURE 3.9 Schematic of the cluster deposition setup with ACIS at the Universitat Rostock. Reprinted with permission from Ref. [119]. Elsevier B.V. 

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