Vectorscan systems

In vectorscan systems, the beam is only directed to those areas of the chip that require exposure. With round beams, the beam diameter must be less than or equal to one quarter of the minimum linewidth, and to obtain adequate pattern fidelity, the beam must be incremented to at least sixteen positions to write a single minimum image square. Chip writing time can be estimated from the beam incrementing rate, and the average fraction of the chip area that needs to... 

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