Vacuum pumps, capture getter

Sputter-ion pump A capture (getter) pump in which the gettering material is continuously being renewed by sputter deposition. See also Vacuum pump. 

Vacuum pump, ion pump A capture-type vacuum pump where a getter material is deposited by sputtering and gaseous ions are accelerated to the reactive surface to react with the surface or be physically buried in the depositing material. Also called a Getter ion pump. 

The getter pump is a capture-type pump that functions by having a sixrface that chemically reacts with the gases to be pumped or will absorb the gases into the bulk of the getter material. The reactive surface can be formed by continuous or periodic deposition of a reactive material such as titanium or zirconium or can be in the form of a permanent solid surface that can be regenerated. These types of pump are typically used in ultraclean vacuum... 

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