Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Tungsten erosion rate

This reaction proceeds at a much faster rate than the hydrogen reduction of WFg. The result is erosion of the silicon substrate causing encroachment and tunnel defects. The use of a different precursor, such as tungsten carbonyl, W(CO)g, may solve this problem. CVD tungsten is presently limited mostly to multilevel-via-fill applications. [Pg.370]

See other pages where Tungsten erosion rate is mentioned: [Pg.430]    [Pg.127]    [Pg.87]    [Pg.290]    [Pg.293]    [Pg.14]    [Pg.14]    [Pg.66]    [Pg.130]    [Pg.137]    [Pg.787]    [Pg.1864]    [Pg.271]    [Pg.179]    [Pg.180]    [Pg.79]    [Pg.221]    [Pg.19]    [Pg.79]    [Pg.611]    [Pg.1623]    [Pg.289]    [Pg.529]    [Pg.954]    [Pg.959]    [Pg.791]    [Pg.1868]    [Pg.648]    [Pg.562]   
See also in sourсe #XX -- [ Pg.66 ]



SEARCH



Erosion rate

© 2024 chempedia.info