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Tungsten depth profile

Figure 26.3 Factor analysis of the W2N/W sample, (a) Usual AES depth profile the insert shows the shape of the derivative C KLL Auger peak at the film-substrate interface, (b) FA of the tungsten signal left, the pure components spectra right, the concentrations profile the sputtering time per cycle was 30 s. Figure 26.3 Factor analysis of the W2N/W sample, (a) Usual AES depth profile the insert shows the shape of the derivative C KLL Auger peak at the film-substrate interface, (b) FA of the tungsten signal left, the pure components spectra right, the concentrations profile the sputtering time per cycle was 30 s.
The application of LA-ICP-ToF-MS and LA-ICP-QMS for depth profiling of various titanium based coatings on steel and tungsten carbide and Ti based single layers is discussed in references respectively. Thickness determination was performed by LA-ICP-QMS with 5% RSD, a laser ablation rate of < 100 nm per laser shot (Nd-YAG laser at wavelength 266 nm using a laser energy of 1.5 ml at 120 p,m laser spot size), and a depth resolution of 2.5 p-m was observed. ... [Pg.283]


See other pages where Tungsten depth profile is mentioned: [Pg.355]    [Pg.281]    [Pg.283]    [Pg.433]    [Pg.281]    [Pg.221]    [Pg.222]    [Pg.222]    [Pg.67]    [Pg.910]    [Pg.1027]    [Pg.1034]    [Pg.879]    [Pg.140]    [Pg.277]    [Pg.811]    [Pg.255]    [Pg.483]    [Pg.354]    [Pg.534]    [Pg.337]    [Pg.218]    [Pg.238]    [Pg.21]    [Pg.119]   
See also in sourсe #XX -- [ Pg.65 , Pg.67 ]




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