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Tribology microelectromechanical systems

Bhushan B. Tribology on the macroscale to nanoscale of microelectromechanical system materials a review, Proc Instn Mech Engrs 215, 1 18(2001). [Pg.63]

See other pages where Tribology microelectromechanical systems is mentioned: [Pg.379]    [Pg.395]    [Pg.296]    [Pg.481]    [Pg.216]    [Pg.82]    [Pg.50]    [Pg.389]    [Pg.1]    [Pg.39]   
See also in sourсe #XX -- [ Pg.3053 ]



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