Tribology analysis modes

The existence of a fluid layer is beneficial for two reasons. First the fluid layer will act as a lubricating agent and conduct heat away from the surface. Second, slurry transport is expected to be more efficient with a fluid layer. It is expected that CMP does indeed involve a fluid layer that is either continuous or partial. It is not clear, however, if the fluid layer is partial or continuous. In the remainder of this section, we discuss the results of a tribological analysis by Runnels and Eyman, while in Section 4.4.2 we shall discuss the implications of partial or continuous fluid layers on the mode of abrasion. 

Figure 5. X-ray absorption spectroscopy as applied to tribology (a) e. situ wear particle analysis in the transmission mode, (b) in situ surface analysis (total electron yield. X-itiy fluorescence or photoelectrons), (c) in vivo frictional interface analysis in the transmission mode.

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