Tip-Based Oxidation Nanolithography

Field-Induced Nanoscale Water Bridges and Tip-Based Oxidation Nanolithography... 

The sequential character of AFM somehow limits the technological applications of tip-based nanolithographies, in particular AFM oxidation. In addition, the patterning area is limited by the AFM scanner, which usually has a range of 10-50 microns. To overcome these limitations, several methods have been proposed to upscale the local oxidation process by using a conductive stamp with multiple protrusions as the cathode electrode " (Fig. 13.17a). Then, in a single step a large area could be patterned with millions of nanostructures. 

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