Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Three-component, aqueous-base developable

Three component, aqueous-base developable, positive-tone resists utilizing the chemical amplification principle have also recently been reported (81,82). In these systems, irradiation of a phenolic resin/inhibitor/acid generator resist generates an acid which upon mild heating, catalyzes either depolymerization or deblocking of a... [Pg.13]

J.M.J. Frechet and S.M. Lee, New three component aqueous base developable negative resist systems incorporating chemical amplification and tunable sensitivities, Proc. SPIE 1925, 102... [Pg.240]

Acid-catalyzed condensation has been the primary and dominant foundation for aqueous base developable negative resist systems [354-363]. The first commercial chemical amplification resist was built on this mechanism. The condensation resists are typically three-component systems comprising a base soluble binder resin bearing reaction sites for crosslinking (phenolic resin), a radiation-sensitive acid generator, and an acid-sensitive latent electrophile... [Pg.152]

Aqueous-base-developable two- and three-component negative resists based on the principle of pinacol rearrangement have also been reported. The... [Pg.235]

Boronic acid-derived fluorescent chemosensors are unique in that the inter-molecular interaction is a covalent bond, and not hydrogen bonding as is the case for most conventional fluorescent molecular sensors used for the selective reeognition of hydroxyl carboxylic acids. This chapter summarizes the development of the boronic acid-based chiral fluorescent chemosensors over recent years and the enantioselective fluorescent reeognition of chiral a-hydroxyl carboxylic acids analytes in aqueous solutions. The fundamental scaffolds of these chiral sensors include a fluorophore, an arylboronie aeid binding site, and linker between the two units. The systems usually consist of a bis-boronic acid unit, which is required for enantioselective recognition of the chiral a-hydroxyl carboxylic acid analytes. However, mono-boronic acid fluorescent chemosensors have also been developed. All three components of the chiral boronic acid sensors play an important role in determining the... [Pg.198]


See other pages where Three-component, aqueous-base developable is mentioned: [Pg.149]    [Pg.159]    [Pg.238]    [Pg.329]    [Pg.74]    [Pg.156]    [Pg.186]    [Pg.550]    [Pg.266]    [Pg.436]    [Pg.264]    [Pg.192]    [Pg.335]    [Pg.3022]    [Pg.8]    [Pg.165]    [Pg.110]    [Pg.20]    [Pg.1313]    [Pg.261]    [Pg.58]    [Pg.176]    [Pg.207]   


SEARCH



Aqueous base

Base component

Three-component

© 2024 chempedia.info