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Thermomechanical actuators force

Generally, the chemical and physical properties of most engineering materials vary with temperature. The (Mily difference hes in the degree to which the property changes with temperature. Among all the properties, the material shape change with temperature has mostly been used for the development of thermomechanical microvalves. The detailed mechanisms of thermomechanical microvalves will be discussed below. Briefly, the deformation of the material shape causes an actuation force, which can be used to induce mechanical actions through... [Pg.3289]

The American company IC-Sensors offers a thermomechanically driven microvalve (with 2/2-way functionality) for gases (Fig. 6.113) [315]. The valve consists of an elastically suspended valve reed and a rigid valve base with a valve opening. The valve reed can be put into motion using the thermomechanical (bimetallic) effect. The temperature of the bimetallic structure of aluminium and silicon is used to control the actuator force. The normally closed valves are designed for a maximum pressure of 10... 200kPa. Gas flows of up to 0.11/min are achieved with a driving power of 300 mW. [Pg.233]

Various thermomechanical microvalves have been developed with the development of MEMS fabrication technology. Thermomechanical microvalves work by converting thermal energy into mechanical deformation. Compared with other microvalves, such as magnetic microvalves, electrostatic microvalves, and piezoelectric microvalves, thermally driven microvalves have their own advantages such as simplicity of fabrication, controllable deflection (by adjusting the input power), and a relatively large actuation force. [Pg.2059]


See other pages where Thermomechanical actuators force is mentioned: [Pg.76]    [Pg.80]    [Pg.2048]    [Pg.1745]    [Pg.1855]    [Pg.1080]    [Pg.1135]   
See also in sourсe #XX -- [ Pg.149 ]




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