Thermochemistry and Kinetics of Organometallic Tin Compounds in the

Rate constants for elementary reactions involving tin compounds are even rarer. In an important recent investigation, Takahashi et al. performed shock-tube measurements and RRKM analysis from which they obtained rate constants for several important reactions involved in mechanism for SnCU pyrolysis [50]  

Unfortunately, these reactions and those between tin atoms and various small molecules that have been reported (see Takahashi et al. [50] and references therein) are not expected to play a significant role in typical CVD processes. One reaction that very likely is important to the decomposition of precursors of the form RSnCls such as MBTC is 

Takahashi et al. were unable to determine a rate for R4 because the low Sn - Cl bond energy in SnCls makes this reaction fast relative to SnCl4 and SnCl2 decomposition. 

The first measurements of organometallic precursor decomposition that we are aware of were reported by Price et al. [51,52], who used a flow tube to measure the decomposition rates of TMT and DMTC. Although their re- 

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