Thermally Driven Mechanical Valves

Thermal mechanical valves Thermally actuated mechanical valves Thermally driven mechanical valves... 

Different thermomechanical microvalves use different mechanisms to control the valve although all of them are based on the deformation of the material due to thermal expansion. For example, a thermal expansion microvalve utilizes the thermal expansion of a single material to open or close the flow, a bimetallic microvalve utilizes the thermal expansion difference between two materials which are bond together to open or close the flow, and a thermally driven SMA... 

Various thermomechanical microvalves have been developed with the development of MEMS fabrication technology. Thermomechanical micro valves work by converting thermal energy into mechanical deformation. Compared with other microvalves, such as magnetic microvalves, electrostatic microvalves, and piezoelectric microvalves, thermally driven microvalves have their own advantages such as simphcity of fabrication, controllable deflection... 

---