Theory of SIMS

The signal intensity of an elemental positive or negative secondary ion is given 

Y is the sputter yield of the element, equal to the number of atoms ejected per incident ion  

R1 is the probability that the particle leaves the surface as a positive or negative ion  

T is the transmission of the mass spectrometer, typically 10-3 for a quadru-pole and 10-1 for a TOF instrument. 

The essential quantities that determine the yield of secondary ions in a SIMS spectrum are thus the sputter yield, Y, and the ionization probability, R . 

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PTMC phenomenological theory of SIM stress-induced martensite... 

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