The Facilities Side of CMP

Microelectronic Applications of Chemical Mechanical Planarization, Edited by Yuzhuo Li Copyright 2008 John Wiley Sons, Inc. 

Each CMP waste system will have two primary components  

A collection system is an array of piping under the manufacturing tools that accumulates the waste at a single point, such as a buffer or storage tank. The contents of the tank are then pumped to the unit operations of treatment system. The treatment system is a series of unit operations that modify the waste to produce a desired result, such as the removal of trace metals from the liquid stream. 

This chapter will describe the various aspects that must not only be appreciated by the facilities engineer designing the CMP waste treatment system, but also be taken into consideration by the process engineers developing new CMP chemistries. 

Specialized collection and treatment systems are designed and operated based on the specific properties of the CMP waste drained from the clean room. Therefore, it is paramount to understand the details of the CMP waste, such as, but not limited to, the following  

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