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Tantalum subhalides

Electrodeposition of tantalum thin layers in the water- and air-stable ionic liquid 1-butyl-l-methyl pyrrolidinium bis (trifluoromethylsulfonyl) amide at 200 °C using TaFs as a source of tantalum is presented in this protocol. The electrodeposition of Ta is not a straightforward process as, under the wrong experimental conditions. Ta subhalides can be formed, see Chapter 4.4. [Pg.364]


See other pages where Tantalum subhalides is mentioned: [Pg.340]    [Pg.101]    [Pg.2948]    [Pg.2950]    [Pg.2947]    [Pg.2949]   


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Subhalides

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