Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Structural materials polycrystalline homogenization

Crystalline structure and defects since the sputtering yield depends on the crystalline orientation (46-47). a polycrystalline material will produce characteristic steps [48) and the depth resolution will be reduced. The best materials for yield measurements are either single crystals or totally amorphous materials. It has been shown that the introduction of reactive ions leads to a smoother sputtered surface (49-.5I) than that resulting from noble-gas ion sputtering. This is probably due to the formation of an amorphous surface oxide layer, which then sputters homogeneously (52). [Pg.270]


See other pages where Structural materials polycrystalline homogenization is mentioned: [Pg.184]    [Pg.310]    [Pg.315]    [Pg.224]    [Pg.304]    [Pg.277]    [Pg.605]    [Pg.219]    [Pg.8]    [Pg.223]    [Pg.180]    [Pg.102]    [Pg.215]    [Pg.89]    [Pg.326]    [Pg.157]    [Pg.211]    [Pg.78]   
See also in sourсe #XX -- [ Pg.246 ]




SEARCH



Homogeneous structure

Material structure

Polycrystalline

Polycrystalline structure

Polycrystallines

Polycrystallinity

Structural homogeneity

© 2024 chempedia.info