STI CMP Performance in Different Suspension pH

FIGURE 3.11 (a) Particle size distribution of ceria slurries (b) optical micrographs of ceria slurries in suspensions of different pH. 

FIGURE 3.12 The result of CMP field evaluation (a) average PETEOS removal rate and (b) average nitride removal rate. 

FIGURE 3.15 Force-separation profile between the AFM tip and a SiN film with different concentration of KNO3 at pH 6.5. 

FIGURE 3.16 Schematic diagram of the adsorption behavior and conformation of PAA on SiN film. 

FIGURE 3.17 Removal rate trends along the entire resultant (a) SiOj and (b) SiN film. 

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